Microlithography
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Published By CRC Press

9781315117171
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Optical Nanolithography

2020 ◽  
pp. 41-140
Author(s):  
Bruce W. Smith
Keyword(s):  
Optical Nanolithography

Chemistry of Photoresist Materials

2020 ◽  
pp. 327-418
Author(s):  
Takumi Ueno ◽  
Robert D. Allen ◽  
James Thackeray

Multiple Patterning Lithography

2020 ◽  
pp. 141-162
Author(s):  
Carlos Fonseca ◽  
Chris Bencher ◽  
Bruce W. Smith

Lithography, Etch, and Silicon Process Technology

2020 ◽  
pp. 1-40
Author(s):  
Matthew Colburn ◽  
Derren N. Dunn ◽  
Michael A. Guillorn
Keyword(s):  
Process Technology

Alignment and Overlay

2020 ◽  
pp. 247-292
Author(s):  
David Laidler ◽  
Gregg M. Gallatin

Metrology for Nanolithography

2020 ◽  
pp. 679-766
Author(s):  
Kazuaki Suzuki ◽  
Eran Amit

Maskless Lithography

2020 ◽  
pp. 555-594
Author(s):  
Kazuaki Suzuki
Keyword(s):  
Maskless Lithography

Directed Self-Assembly of Block Copolymers

2020 ◽  
pp. 767-824
Author(s):  
Chi-chun Liu ◽  
Kenji Yoshimoto ◽  
Juan de Pablo ◽  
Paul Nealey
Keyword(s):  
Block Copolymers ◽  
Self Assembly

Optical Lithography Modeling

2020 ◽  
pp. 493-554
Author(s):  
Chris A. Mack ◽  
John J. Biafore ◽  
Mark D. Smith
Keyword(s):  
Optical Lithography
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