Technical Digest IEEE Solid-State Sensor and Actuator Workshop
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

078030456x

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A wafer-bonded silicon load cell operating in the tensioned-wire regime

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228302 ◽

2003 ◽

Cited By ~ 5

Author(s):

A.D. Nikolich ◽

S.D. Senturia

Keyword(s):

Load Cell

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A vertical Hall magnetic field sensor using CMOS-compatible micromachining techniques

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228282 ◽

2003 ◽

Cited By ~ 2

Author(s):

M. Paranjape ◽

Lj. Ristic ◽

W. Allegretto

Keyword(s):

Magnetic Field ◽

Magnetic Field Sensor ◽

Field Sensor ◽

Cmos Compatible

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A comparison of muscle with artificial actuators

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228297 ◽

2003 ◽

Cited By ~ 111

Author(s):

I.W. Hunter ◽

S. Lafontaine

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Temperature coefficient of resistance of piezoresistors

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228277 ◽

2003 ◽

Cited By ~ 2

Author(s):

U. Sridhar ◽

R. Foster

Keyword(s):

Temperature Coefficient ◽

Temperature Coefficient Of Resistance

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Preliminary results for a planar microdynamometer

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228288 ◽

2003 ◽

Cited By ~ 8

Author(s):

T.R. Christenson ◽

H. Guckel ◽

K.J. Skrobis ◽

T.S. Jung

Keyword(s):

Preliminary Results

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Biochemical sensors

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228315 ◽

2003 ◽

Author(s):

W.R. Heineman ◽

H.B. Halsall

Keyword(s):

Biochemical Sensors

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Strain and strain relief in highly doped silicon

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228272 ◽

2003 ◽

Cited By ~ 13

Author(s):

L.B. Wilner

Keyword(s):

Strain Relief ◽

Doped Silicon

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Dynamics and response of polymer-coated acoustic devices

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228283 ◽

2003 ◽

Cited By ~ 1

Author(s):

S.J. Martin ◽

G.C. Frye

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Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228309 ◽

2003 ◽

Cited By ~ 57

Author(s):

Weijie Yun ◽

R.T. Howe ◽

P.R. Gray

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Patterning of zinc oxide thin films

Technical Digest IEEE Solid-State Sensor and Actuator Workshop ◽

10.1109/solsen.1992.228280 ◽

2003 ◽

Cited By ~ 12

Author(s):

Shih-Chia Chang ◽

D.B. Hicks ◽

R.C.O. Laugal

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Oxide Thin Films

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Technical Digest IEEE Solid-State Sensor and Actuator WorkshopLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A wafer-bonded silicon load cell operating in the tensioned-wire regime

A vertical Hall magnetic field sensor using CMOS-compatible micromachining techniques

A comparison of muscle with artificial actuators

Temperature coefficient of resistance of piezoresistors

Preliminary results for a planar microdynamometer

Biochemical sensors

Strain and strain relief in highly doped silicon

Dynamics and response of polymer-coated acoustic devices

Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry

Patterning of zinc oxide thin films

Technical Digest IEEE Solid-State Sensor and Actuator Workshop
Latest Publications