Sputtering Materials for VLSI and Thin Film Devices
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Published By Elsevier

9780815515937

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Preface

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00012-6 ◽

2014 ◽

pp. ix-x

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Performance of Sputtering Targets and Productivity

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00003-5 ◽

2014 ◽

pp. 171-195

Author(s):

Jaydeep Sarkar

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Index

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00020-5 ◽

2014 ◽

pp. 593-603

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Troubleshooting in Sputter Deposition

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00008-4 ◽

2014 ◽

pp. 567-592

Author(s):

Jaydeep Sarkar

Keyword(s):

Sputter Deposition

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Ferromagnetic Sputtering Targets and Thin Films for Silicides and Data Storage

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00007-2 ◽

2014 ◽

pp. 501-565

Author(s):

Jaydeep Sarkar

Keyword(s):

Thin Films ◽

Data Storage

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Sputtering and Thin Film Deposition

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00002-3 ◽

2014 ◽

pp. 93-170 ◽

Cited By ~ 4

Author(s):

Jaydeep Sarkar

Keyword(s):

Thin Film ◽

Thin Film Deposition ◽

Film Deposition

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Sputtering Target Manufacturing

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00004-7 ◽

2014 ◽

pp. 197-289 ◽

Cited By ~ 1

Author(s):

Jaydeep Sarkar

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Front-matter

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00009-6 ◽

2014 ◽

pp. i-iii ◽

Cited By ~ 1

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Copyright

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00010-2 ◽

2014 ◽

pp. iv

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Sputtering Targets and Thin Films for Integrated Circuits

Sputtering Materials for VLSI and Thin Film Devices ◽

10.1016/b978-0-8155-1593-7.00005-9 ◽

2014 ◽

pp. 291-416 ◽

Cited By ~ 1

Author(s):

Jaydeep Sarkar

Keyword(s):

Thin Films ◽

Integrated Circuits

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