Statistical Case Studies for Industrial Process Improvement
Latest Publications

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Published By Society For Industrial And Applied Mathematics

9780898713947, 9780898719765

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

19. Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch19 ◽

1997 ◽

pp. 265-281

Author(s):

Fred Preuninger ◽

Joseph Blasko ◽

Steven Meester ◽

Taeho Kook

Keyword(s):

Experimental Design ◽

Polycrystalline Silicon

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24. Obtaining and Using Statistical Process Control Limits in the Semiconductor Industry

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch24 ◽

1997 ◽

pp. 337-356 ◽

Cited By ~ 4

Author(s):

Madhukar Joshi ◽

Kimberley Sprague

Keyword(s):

Process Control ◽

Statistical Process Control ◽

Semiconductor Industry ◽

Statistical Process ◽

Control Limits

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27. Experimentation for Equipment Reliability Improvement

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch27 ◽

1997 ◽

pp. 387-401 ◽

Cited By ~ 3

Author(s):

Donald K. Lewis ◽

Craig Hutchens ◽

Joseph M. Smith

Keyword(s):

Reliability Improvement ◽

Equipment Reliability

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9. Identifying Sources of Variation in a Wafer Planarization Process

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch9 ◽

1997 ◽

pp. 105-114 ◽

Cited By ~ 1

Author(s):

Arnon M. Hurwitz ◽

Patrick D. Spagon

Keyword(s):

Sources Of Variation ◽

Planarization Process

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7. Understanding the Nature of Variability in a Dry Etch Process

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch7 ◽

1997 ◽

pp. 71-85

Author(s):

Richard O. Lynch ◽

Richard J. Markle

Keyword(s):

Dry Etch

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6. Introduction to Passive Data Collection

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch6 ◽

1997 ◽

pp. 63-69 ◽

Cited By ~ 1

Author(s):

Veronica Czitrom

Keyword(s):

Data Collection ◽

Passive Data

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28. How to Determine Component-Based Preventive Maintenance Plans

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch28 ◽

1997 ◽

pp. 403-424

Author(s):

Stephen V. Crowder

Keyword(s):

Preventive Maintenance

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16. Modeling a Uniformity Bulls-Eye Inversion

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch16 ◽

1997 ◽

pp. 213-234 ◽

Cited By ~ 1

Author(s):

James Buckner ◽

Richard Huang ◽

Kenneth A. Monnig ◽

Eliot K. Broadbent ◽

Barry L. Chin ◽

...

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12. Sampling to Meet a Variance Specification: Clean Room Qualification

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch12 ◽

1997 ◽

pp. 145-154

Author(s):

Kathryn Hall ◽

Steven Carpenter

Keyword(s):

Clean Room

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8. Virgin versus Recycled Wafers for Furnace Qualification: Is the Expense Justified?

Statistical Case Studies for Industrial Process Improvement ◽

10.1137/1.9780898719765.ch8 ◽

1997 ◽

pp. 87-104 ◽

Cited By ~ 1

Author(s):

Veronica Czitrom ◽

Jack E. Reece

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Statistical Case Studies for Industrial Process ImprovementLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Society For Industrial And Applied Mathematics

19. Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates

24. Obtaining and Using Statistical Process Control Limits in the Semiconductor Industry

27. Experimentation for Equipment Reliability Improvement

9. Identifying Sources of Variation in a Wafer Planarization Process

7. Understanding the Nature of Variability in a Dry Etch Process

6. Introduction to Passive Data Collection

28. How to Determine Component-Based Preventive Maintenance Plans

16. Modeling a Uniformity Bulls-Eye Inversion

12. Sampling to Meet a Variance Specification: Clean Room Qualification

8. Virgin versus Recycled Wafers for Furnace Qualification: Is the Expense Justified?

Statistical Case Studies for Industrial Process Improvement
Latest Publications