Chemical Vapour Deposition
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Published By Royal Society Of Chemistry

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Chapter 13. Commercial Aspects of CVD

2008 ◽  
pp. 535-570
Author(s):  
Albert Barry Leese ◽  
Alan Rodney Mills

Chapter 10. CVD of Functional Coatings on Glass

2008 ◽  
pp. 451-476 ◽  
Author(s):  
Ivan P. Parkin ◽  
Robert G. Palgrave
Keyword(s):  
Functional Coatings

Chapter 11. Photo-assisted CVD

2008 ◽  
pp. 477-493
Author(s):  
Stuart J. C. Irvine ◽  
Dan Lamb

Chapter 4. Atomic Layer Deposition

2008 ◽  
pp. 158-206 ◽  
Author(s):  
Mikko Ritala ◽  
Jaakko Niinistö
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Chapter 6. CVD of III-V Compound Semiconductors

2008 ◽  
pp. 272-319
Author(s):  
Jae-Hyun Ryou ◽  
Ravi Kanjolia ◽  
Russell D. Dupuis
Keyword(s):  
Compound Semiconductors
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