Integrated Circuit Fabrication
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Published By CRC Press

9781003178583
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Introduction to Silicon Wafer Processing

2021 ◽  
pp. 1-36
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta
Keyword(s):  
Silicon Wafer ◽  
Wafer Processing

Packaging

2021 ◽  
pp. 279-294
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta

Epitaxy

2021 ◽  
pp. 37-73
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta

VLSI Process Integration

2021 ◽  
pp. 295-324
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta
Keyword(s):  
Process Integration

Oxidation

2021 ◽  
pp. 75-101
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta

Lithography

2021 ◽  
pp. 103-138
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta

Ion Implantation

2021 ◽  
pp. 207-239
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta
Keyword(s):  
Ion Implantation

Etching

2021 ◽  
pp. 139-165
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta

Diffusion

2021 ◽  
pp. 167-205
Author(s):  
Kumar Shubham ◽  
Ankaj Gupta
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