Handbook of Thin Film Deposition Processes and Techniques
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Published By Elsevier

9780815514428

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Preface to the First Edition

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50003-1 ◽

2001 ◽

pp. xiii-xiv

Author(s):

Klaus K. Schuegraf

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Foreword

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50001-8 ◽

2001 ◽

pp. ix-x ◽

Cited By ~ 2

Author(s):

Gordon E. Moore

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Chemical Vapor Deposition of Silicon Dioxide Films

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50008-0 ◽

2001 ◽

pp. 111-150 ◽

Cited By ~ 11

Author(s):

John Foggiato

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Dioxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Dioxide Films

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Molecular Beam Epitaxy

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50015-8 ◽

2001 ◽

pp. 381-461 ◽

Cited By ~ 1

Author(s):

Walter S. Knodle ◽

Robert Chow

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam

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Contributors

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50004-3 ◽

2001 ◽

pp. xv-xvi ◽

Cited By ~ 1

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Recent Changes in the Semiconductor Industry

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50005-5 ◽

2001 ◽

pp. 1-9

Author(s):

Krishna Seshan

Keyword(s):

Semiconductor Industry

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Sputtering and Sputter Deposition

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50013-4 ◽

2001 ◽

pp. 319-348 ◽

Cited By ~ 9

Author(s):

Stephen Rossnagel

Keyword(s):

Sputter Deposition

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Laser and Electron Beam Assisted Processing

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50014-6 ◽

2001 ◽

pp. 349-379

Author(s):

Cameron A. Moore ◽

Zeng-qi Yu ◽

Lance R. Thompson ◽

George J. Collins

Keyword(s):

Electron Beam

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Organic Dielectrics in Multilevel Metallization of Integrated Circuits

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50018-3 ◽

2001 ◽

pp. 513-593

Author(s):

Krishna Seshan ◽

Dominic J. Schepis ◽

Laura B. Rothman

Keyword(s):

Integrated Circuits ◽

Organic Dielectrics

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Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing

Handbook of Thin Film Deposition Processes and Techniques ◽

10.1016/b978-081551442-8.50012-2 ◽

2001 ◽

pp. 287-318

Author(s):

Suresh Bhat ◽

Krishna Seshan

Keyword(s):

Defect Detection ◽

Yield Enhancement ◽

Contamination Control

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Handbook of Thin Film Deposition Processes and TechniquesLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Elsevier

Preface to the First Edition

Foreword

Chemical Vapor Deposition of Silicon Dioxide Films

Molecular Beam Epitaxy

Contributors

Recent Changes in the Semiconductor Industry

Sputtering and Sputter Deposition

Laser and Electron Beam Assisted Processing

Organic Dielectrics in Multilevel Metallization of Integrated Circuits

Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing

Handbook of Thin Film Deposition Processes and Techniques
Latest Publications