Reduced Thermal Processing for ULSI - NATO ASI Series
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Published By Springer US

9781461278573, 9781461305415

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Multilevel Interconnect Structures

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_9 ◽

1989 ◽

pp. 295-353

Author(s):

Terry O. Herndon

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Micrometallization Technologies

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_8 ◽

1989 ◽

pp. 269-294 ◽

Cited By ~ 1

Author(s):

J. M. Martínez-Duart ◽

J. M. Albella

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Microstructural Defects in Rapid Thermally Processed IC Materials

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_3 ◽

1989 ◽

pp. 117-141 ◽

Cited By ~ 2

Author(s):

Alec H. Reader

Keyword(s):

Thermally Processed ◽

Microstructural Defects

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Rapid Thermal Processing With Reactive Gases

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_1 ◽

1989 ◽

pp. 1-52 ◽

Cited By ~ 2

Author(s):

Jaim Nulman

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Reactive Gases

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Interlevel Dielectrics for Reduced Thermal Processing

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_10 ◽

1989 ◽

pp. 355-392 ◽

Cited By ~ 2

Author(s):

F. S. Becker

Keyword(s):

Thermal Processing

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Ion Beam Assisted Processes

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_7 ◽

1989 ◽

pp. 253-268

Author(s):

Gaetano Foti

Keyword(s):

Ion Beam

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Silicidation by Rapid Thermal Processing

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_2 ◽

1989 ◽

pp. 53-115 ◽

Cited By ~ 2

Author(s):

L. Van den hove ◽

R. F. De Keersmaecker

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing

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Rapid Thermal Annealing - Theory and Practice

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_4 ◽

1989 ◽

pp. 143-180 ◽

Cited By ~ 22

Author(s):

C. Hill ◽

S. Jones ◽

D. Boys

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Theory And Practice

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Low Temperature Silicon Epitaxy for Novel Device Structures

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_11 ◽

1989 ◽

pp. 393-429

Author(s):

John Ogawa Borland

Keyword(s):

Low Temperature ◽

Silicon Epitaxy ◽

Novel Device ◽

Device Structures

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Introduction to Direct Writing of Integrated Circuit

Reduced Thermal Processing for ULSI - NATO ASI Series ◽

10.1007/978-1-4613-0541-5_6 ◽

1989 ◽

pp. 227-251 ◽

Cited By ~ 1

Author(s):

Geoffroy Auvert

Keyword(s):

Integrated Circuit ◽

Direct Writing

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Reduced Thermal Processing for ULSI - NATO ASI SeriesLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer US

Multilevel Interconnect Structures

Micrometallization Technologies

Microstructural Defects in Rapid Thermally Processed IC Materials

Rapid Thermal Processing With Reactive Gases

Interlevel Dielectrics for Reduced Thermal Processing

Ion Beam Assisted Processes

Silicidation by Rapid Thermal Processing

Rapid Thermal Annealing - Theory and Practice

Low Temperature Silicon Epitaxy for Novel Device Structures

Introduction to Direct Writing of Integrated Circuit

Reduced Thermal Processing for ULSI - NATO ASI Series
Latest Publications