Ion Beam Assisted Film Growth
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Published By Elsevier

9780444872807
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ION BEAM SYNTHESIS OF FILMS

1989 ◽  
pp. 379-424 ◽  
Author(s):  
I.H. Wilson ◽  
P.L.F. Hemment ◽  
K.G. Stephens
Keyword(s):  
Ion Beam ◽  
Ion Beam Synthesis

LOW-ENERGY ION/SURFACE INTERACTIONS DURING FILM GROWTH FROM THE VAPOR PHASE

1989 ◽  
pp. 101-152 ◽  
Author(s):  
J.E. Greene ◽  
S.A. Barnett ◽  
J.-E. Sundgren ◽  
A. Rockett
Keyword(s):  
Vapor Phase ◽  
Film Growth ◽  
Surface Interactions ◽  
Low Energy

DIRECT ION BEAM DEPOSITION

1989 ◽  
pp. 289-318 ◽  
Author(s):  
Kiyoshi Miyake ◽  
Takashi Tokuyama
Keyword(s):  
Ion Beam ◽  
Ion Beam Deposition ◽  
Beam Deposition

SPUTTERING YIELD

1989 ◽  
pp. 59-100 ◽  
Author(s):  
Yasunori YAMAMURA ◽  
Noriaki ITOH
Keyword(s):  
Sputtering Yield
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