Manufacturing Techniques for Microfabrication and Nanotechnology
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Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-8 ◽

2011 ◽

pp. 229-332 ◽

Cited By ~ 1

Keyword(s):

Chemical Etching ◽

Wet Chemical ◽

Wet Chemical Etching

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Photolithography

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-5 ◽

2011 ◽

pp. 17-102

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Micromolding Techniques—LIGA

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-14 ◽

2011 ◽

pp. 605-656

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Chemical, Photochemical, and Electrochemical Forming Techniques

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-12 ◽

2011 ◽

pp. 523-580

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Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-11 ◽

2011 ◽

pp. 405-522

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Surface Micromachining ◽

Film Properties ◽

Physical And Chemical

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MechanicalEnergy-Based Removing

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-10 ◽

2011 ◽

pp. 365-404

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Thermal Energy-Based Removing

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-9 ◽

2011 ◽

pp. 333-364

Keyword(s):

Thermal Energy

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Thermal Energy-Based Forming Techniques—Thermoforming

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-13 ◽

2011 ◽

pp. 581-604

Keyword(s):

Thermal Energy

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Dry Etching

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-7 ◽

2011 ◽

pp. 169-228

Keyword(s):

Dry Etching

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Next-Generation Lithographies and Lithography Research

Manufacturing Techniques for Microfabrication and Nanotechnology ◽

10.1201/9781439895306-6 ◽

2011 ◽

pp. 103-168

Keyword(s):

Next Generation

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Manufacturing Techniques for Microfabrication and NanotechnologyLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools

Photolithography

Micromolding Techniques—LIGA

Chemical, Photochemical, and Electrochemical Forming Techniques

Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining

MechanicalEnergy-Based Removing

Thermal Energy-Based Removing

Thermal Energy-Based Forming Techniques—Thermoforming

Dry Etching

Next-Generation Lithographies and Lithography Research

Manufacturing Techniques for Microfabrication and Nanotechnology
Latest Publications