Handbook of Silicon Semiconductor Metrology
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Published By CRC Press

9780824705060, 9780203904541

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch29 ◽

2001 ◽

Cited By ~ 1

Author(s):

Alain Diebold

Keyword(s):

Electron Microscopy ◽

Reference Materials

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Statistical Metrology, with Applications to Interconnect and Yield Modeling

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch24 ◽

2001 ◽

Cited By ~ 2

Author(s):

Duane Boning

Keyword(s):

Yield Modeling

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In Situ Metrology

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch22 ◽

2001 ◽

Cited By ~ 1

Author(s):

Bradley Van Eck ◽

Jimmy Barna ◽

Gabriel Hosch

Keyword(s):

In Situ Metrology

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High-Resolution Profilometry for CMP and Etch Metrology

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch13 ◽

2001 ◽

Author(s):

Clive Hayzelden ◽

Anna Mathai

Keyword(s):

High Resolution

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Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.fmatt ◽

2001 ◽

Download Full-text

MOS Device Characterization

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch4 ◽

2001 ◽

Author(s):

Eric Vogel ◽

Veena Misra

Keyword(s):

Device Characterization ◽

Mos Device

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Analysis of Thin-Layer Structures by X-Ray Reflectometry

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch27 ◽

2001 ◽

Cited By ~ 1

Author(s):

Richard Deslattes ◽

Richard Matyi

Keyword(s):

Thin Layer ◽

X Ray ◽

Layer Structures

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Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflecometry and Ellipsometry

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch26 ◽

2001 ◽

Author(s):

P Evrard ◽

C Defranoux ◽

P Boher ◽

J Stehle ◽

J Piel

Keyword(s):

Vacuum Ultraviolet ◽

Extreme Ultraviolet

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Metrology Data Management and Information Systems

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch23 ◽

2001 ◽

Cited By ~ 4

Author(s):

Kenneth Tobin ◽

Leonard Neiberg

Keyword(s):

Information Systems ◽

Data Management

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Particle and Defect Characterization

Handbook of Silicon Semiconductor Metrology ◽

10.1201/9780203904541.ch20 ◽

2001 ◽

Cited By ~ 1

Author(s):

C Brundle ◽

Yuri Uritsky

Keyword(s):

Defect Characterization

Download Full-text

Handbook of Silicon Semiconductor Metrology
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials

Statistical Metrology, with Applications to Interconnect and Yield Modeling

In Situ Metrology

High-Resolution Profilometry for CMP and Etch Metrology

Contents

MOS Device Characterization

Analysis of Thin-Layer Structures by X-Ray Reflectometry

Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflecometry and Ellipsometry

Metrology Data Management and Information Systems

Particle and Defect Characterization

Export Citation Format

Handbook of Silicon Semiconductor MetrologyLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials

Statistical Metrology, with Applications to Interconnect and Yield Modeling

In Situ Metrology

High-Resolution Profilometry for CMP and Etch Metrology

Contents

MOS Device Characterization

Analysis of Thin-Layer Structures by X-Ray Reflectometry

Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflecometry and Ellipsometry

Metrology Data Management and Information Systems

Particle and Defect Characterization

Handbook of Silicon Semiconductor Metrology
Latest Publications