Run-to-Run Control in Semiconductor Manufacturing
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Published By CRC Press

9781315220239

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Process Control and Optimization Methods for Run-to-Run Application

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-8 ◽

2018 ◽

pp. 63-84

Keyword(s):

Process Control ◽

Optimization Methods

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Control of Photolithography Alignment

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-22 ◽

2018 ◽

pp. 267-278

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Multizone Uniformity Control of a CMP Process Utilizing a Pre- and Postmeasurement Strategy

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-21 ◽

2018 ◽

pp. 249-266

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Process Recipe Optimization

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-20 ◽

2018 ◽

pp. 237-248

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The Generic Cell Controller (GCC)

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-15 ◽

2018 ◽

pp. 149-182

Keyword(s):

Cell Controller

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A Comparative Analysis of Run-to-Run Control Algorithms in the Semiconductor Manufacturing Industry

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-12 ◽

2018 ◽

pp. 119-132

Keyword(s):

Comparative Analysis ◽

Semiconductor Manufacturing ◽

Manufacturing Industry ◽

Control Algorithms

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Design and Optimization of an Optimizing Adaptive Quality Controller, Generic Cell Controller Enabled Solution

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-18 ◽

2018 ◽

pp. 209-220

Keyword(s):

Design And Optimization ◽

Cell Controller ◽

Quality Controller

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An Adaptive Run-to-Run Optimizing Controller for Linear and Nonlinear Processes

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-11 ◽

2018 ◽

pp. 109-118

Keyword(s):

Nonlinear Processes ◽

Linear And Nonlinear

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Basic R2R Control Algorithms

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-9 ◽

2018 ◽

pp. 85-98

Keyword(s):

Control Algorithms

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Advanced Process Control in the Semiconductor Industry

Run-to-Run Control in Semiconductor Manufacturing ◽

10.1201/9781420040661-7 ◽

2018 ◽

pp. 33-62

Keyword(s):

Process Control ◽

Semiconductor Industry ◽

Advanced Process Control

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Run-to-Run Control in Semiconductor ManufacturingLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Process Control and Optimization Methods for Run-to-Run Application

Control of Photolithography Alignment

Multizone Uniformity Control of a CMP Process Utilizing a Pre- and Postmeasurement Strategy

Process Recipe Optimization

The Generic Cell Controller (GCC)

A Comparative Analysis of Run-to-Run Control Algorithms in the Semiconductor Manufacturing Industry

Design and Optimization of an Optimizing Adaptive Quality Controller, Generic Cell Controller Enabled Solution

An Adaptive Run-to-Run Optimizing Controller for Linear and Nonlinear Processes

Basic R2R Control Algorithms

Advanced Process Control in the Semiconductor Industry

Run-to-Run Control in Semiconductor Manufacturing
Latest Publications