High Power Impulse Magnetron Sputtering
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Published By Elsevier

9780128124543
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Modeling the high power impulse magnetron sputtering discharge

2020 ◽  
pp. 159-221 ◽  
Author(s):  
Tiberiu Minea ◽  
Tomáš Kozák ◽  
Claudiu Costin ◽  
Jon Tomas Gudmundsson ◽  
Daniel Lundin
Keyword(s):  
Magnetron Sputtering ◽  
High Power

Heavy species dynamics in high power impulse magnetron sputtering discharges

2020 ◽  
pp. 111-158 ◽  
Author(s):  
Martin Čada ◽  
Nikolay Britun ◽  
Ante Hecimovic ◽  
Jon Tomas Gudmundsson ◽  
Daniel Lundin
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Species Dynamics

Introduction to magnetron sputtering

2020 ◽  
pp. 1-48 ◽  
Author(s):  
Jon Tomas Gudmundsson ◽  
Daniel Lundin
Keyword(s):  
Magnetron Sputtering

Contributors

2020 ◽  
pp. xi-xii
Author(s):  
André Anders ◽  
Nils Brenning ◽  
Nikolay Britun ◽  
Martin Čada ◽  
Claudiu Costin ◽  
...  

Reactive high power impulse magnetron sputtering

2020 ◽  
pp. 223-263 ◽  
Author(s):  
Tomáš Kubart ◽  
Jon Tomas Gudmundsson ◽  
Daniel Lundin
Keyword(s):  
Magnetron Sputtering ◽  
High Power
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