2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Latest Publications

TOTAL DOCUMENTS

352

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

9781424496327

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

An unreleased mm-wave Resonant Body Transistor

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734682 ◽

2011 ◽

Cited By ~ 3

Author(s):

Wentao Wang ◽

Laura C. Popa ◽

Radhika Marathe ◽

Dana Weinstein

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Experimental verification of internal friction at GHZ frequencies in doped single-crystal silicon

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734452 ◽

2011 ◽

Cited By ~ 1

Author(s):

Eugene Hwang ◽

Sunil A. Bhave

Keyword(s):

Internal Friction ◽

Single Crystal ◽

Experimental Verification ◽

Single Crystal Silicon ◽

Crystal Silicon

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Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734489 ◽

2011 ◽

Cited By ~ 2

Author(s):

Y. Hotta ◽

Y. Zhang ◽

N. Miki

Keyword(s):

Capacitive Sensor

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Effect of polymer thickness on the chemical sensing behavior of polymer-coated mass-sensitive disk resonators

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734559 ◽

2011 ◽

Author(s):

S. Truax ◽

K.S. Demirci ◽

L. Beardslee ◽

Y. Luzinova ◽

B. Mizaikoff ◽

...

Keyword(s):

Chemical Sensing ◽

Disk Resonators ◽

Polymer Thickness

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System-level characterization of bias noise effects on electrostatic RF MEMS tunable filters

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734545 ◽

2011 ◽

Cited By ~ 2

Author(s):

Xiaoguang Liu ◽

Kenle Chen ◽

Linda P. B. Katehi ◽

William J. Chappell ◽

Dimitrios Peroulis

Keyword(s):

Rf Mems ◽

Tunable Filters ◽

System Level ◽

Noise Effects

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A series array of microliter-sized microbial fuel cell

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734669 ◽

2011 ◽

Cited By ~ 4

Author(s):

S. Choi ◽

J. Chae

Keyword(s):

Fuel Cell ◽

Microbial Fuel Cell

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Ultrathin parylene-C semipermeable membranes for biomedical applications

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734472 ◽

2011 ◽

Cited By ~ 7

Author(s):

Bo Lu ◽

Zhao Liu ◽

Yu-Chong Tai

Keyword(s):

Biomedical Applications ◽

Semipermeable Membranes ◽

Parylene C

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Unraveling the viscosity-mediated coupling effect in biomimetic hair sensor arrays

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734509 ◽

2011 ◽

Cited By ~ 2

Author(s):

R.K. Jaganatharaja ◽

H. Droogendijk ◽

S. Vats ◽

B. Hagedoorn ◽

C.M. Bruinink ◽

...

Keyword(s):

Coupling Effect ◽

Sensor Arrays

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Quality factor improvement of silicon nitride micro string resonators

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734466 ◽

2011 ◽

Cited By ~ 3

Author(s):

S. Schmid ◽

B. Malm ◽

A. Boisen

Keyword(s):

Silicon Nitride ◽

Quality Factor

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Local stress analysis of single crystalline silicon resonator using micro Raman spectroscopy

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2011.5734458 ◽

2011 ◽

Cited By ~ 3

Author(s):

A. Taniyama ◽

Y. Hirai ◽

K. Sugano ◽

O. Tabata ◽

T. Ikehara ◽

...

Keyword(s):

Raman Spectroscopy ◽

Stress Analysis ◽

Crystalline Silicon ◽

Local Stress ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Micro Raman Spectroscopy ◽

Silicon Resonator

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2011 IEEE 24th International Conference on Micro Electro Mechanical SystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

An unreleased mm-wave Resonant Body Transistor

Experimental verification of internal friction at GHZ frequencies in doped single-crystal silicon

Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

Effect of polymer thickness on the chemical sensing behavior of polymer-coated mass-sensitive disk resonators

System-level characterization of bias noise effects on electrostatic RF MEMS tunable filters

A series array of microliter-sized microbial fuel cell

Ultrathin parylene-C semipermeable membranes for biomedical applications

Unraveling the viscosity-mediated coupling effect in biomimetic hair sensor arrays

Quality factor improvement of silicon nitride micro string resonators

Local stress analysis of single crystalline silicon resonator using micro Raman spectroscopy

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Latest Publications