2012 e-Manufacturing & Design Collaboration Symposium (eMDC)
Latest Publications

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Published By IEEE

9781467345422, 9781467345408, 9781467345415

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Modeling equipment functional behavior to track and match performance by fingerprinting

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338442 ◽

2012 ◽

Author(s):

Gino Crispieri

Keyword(s):

Functional Behavior

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Invited Speech: BigData application for 28nm and below

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338431 ◽

2012 ◽

Author(s):

Michael Yu

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Incorporating orthogonal multivariate methods to increase effectiveness

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338421 ◽

2012 ◽

Author(s):

Tamara Byrne

Keyword(s):

Multivariate Methods

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Wireless airborne particle counting wafer revolutionizes contamination control, particle monitoring and predictive maintenance in the fab

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338432 ◽

2012 ◽

Cited By ~ 2

Author(s):

Ferris Chen ◽

Allyn Jackson

Keyword(s):

Predictive Maintenance ◽

Airborne Particle ◽

Contamination Control ◽

Particle Counting ◽

Particle Monitoring

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Yield impact evaluation of abnormal APC data

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338425 ◽

2012 ◽

Author(s):

Chen Chin-Hui

Keyword(s):

Impact Evaluation

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Invited speech: The practical manufacturing focus on the N20 & below

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338441 ◽

2012 ◽

Author(s):

Nail Tang

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The application of e beam inspection on 3D NAND flash

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338433 ◽

2012 ◽

Author(s):

Hsiang-Chou Liao ◽

Yi-Chin Chen ◽

Guan-Ru Lee ◽

Yen-Hao Shih ◽

Hang-Ting Lue ◽

...

Keyword(s):

Nand Flash

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Uptime Sustainability Indices

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338420 ◽

2012 ◽

Author(s):

Leong Kok Chee ◽

Tham Chien Yeh ◽

Teoh Siok Chen

Keyword(s):

Sustainability Indices

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FDC coverage improvement infrastructure

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338428 ◽

2012 ◽

Author(s):

James Lin ◽

Lain Hua Shih ◽

Marty Cheng ◽

Thomson Hseih

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State estimation of missing data imputation

2012 e-Manufacturing & Design Collaboration Symposium (eMDC) ◽

10.1109/emdc.2012.6338419 ◽

2012 ◽

Author(s):

Keung Hui ◽

Jason Mou

Keyword(s):

Missing Data ◽

State Estimation ◽

Data Imputation ◽

Missing Data Imputation ◽

Estimation Of Missing Data

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2012 e-Manufacturing & Design Collaboration Symposium (eMDC)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Modeling equipment functional behavior to track and match performance by fingerprinting

Invited Speech: BigData application for 28nm and below

Incorporating orthogonal multivariate methods to increase effectiveness

Wireless airborne particle counting wafer revolutionizes contamination control, particle monitoring and predictive maintenance in the fab

Yield impact evaluation of abnormal APC data

Invited speech: The practical manufacturing focus on the N20 & below

The application of e beam inspection on 3D NAND flash

Uptime Sustainability Indices

FDC coverage improvement infrastructure

State estimation of missing data imputation

2012 e-Manufacturing & Design Collaboration Symposium (eMDC)
Latest Publications