Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)
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Improvements in process yields for a 200 mm wafer fabricator

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588195 ◽

2002 ◽

Author(s):

G. Ouimet ◽

S. DeBlois

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The cost of ownership

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588241 ◽

2002 ◽

Cited By ~ 1

Author(s):

P.T. Rahaim

Keyword(s):

Cost Of Ownership ◽

The Cost

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Analysis of the effects of cross-field defocus on the photolithographic process window

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588288 ◽

2002 ◽

Author(s):

J.C. Pelligrini ◽

C.B. Sager

Keyword(s):

Process Window

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Ion beam contamination during P/sup +/ source/drain ion implantation

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588257 ◽

2002 ◽

Author(s):

C. Jacobs ◽

M. Karnett ◽

R. Shaw ◽

L. Pulvirent ◽

E. Bendall

Keyword(s):

Ion Implantation ◽

Ion Beam

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Comparison of the applications of process simulations and FMEA: two case studies

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588226 ◽

2002 ◽

Author(s):

S. Tripathi ◽

S. Shankar ◽

F. Moghadam ◽

J. Garcia-Colevatti

Keyword(s):

Case Studies ◽

Process Simulations

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Golden nuggets of AMHS modeling and design for semiconductor wafer fabrication

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588246 ◽

2002 ◽

Cited By ~ 5

Author(s):

N.G. Pierce

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A generic model for cluster tool throughput time and capacity

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588245 ◽

2002 ◽

Cited By ~ 18

Author(s):

S.C. Wood ◽

S. Tripathi ◽

F. Moghadam

Keyword(s):

Generic Model ◽

Throughput Time ◽

Cluster Tool

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Simultaneous control of multiple nonuniformity metrics using site models and monitor wafer control

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588248 ◽

2002 ◽

Cited By ~ 1

Author(s):

P.K. Mozumder ◽

S. Saxena ◽

K. Taylor

Keyword(s):

Simultaneous Control

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Implementing automated equipment performance control in the manufacturing work cell

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588233 ◽

2002 ◽

Author(s):

T. Pomorski

Keyword(s):

Performance Control ◽

Work Cell ◽

Equipment Performance

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The Fraunhofer Institute for Integrated Circuits: bridging the gap between microelectronics technology and applications

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ◽

10.1109/asmc.1994.588222 ◽

2002 ◽

Cited By ~ 1

Author(s):

D. Seitzer

Keyword(s):

Integrated Circuits ◽

Fraunhofer Institute ◽

Microelectronics Technology

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Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Improvements in process yields for a 200 mm wafer fabricator

The cost of ownership

Analysis of the effects of cross-field defocus on the photolithographic process window

Ion beam contamination during P/sup +/ source/drain ion implantation

Comparison of the applications of process simulations and FMEA: two case studies

Golden nuggets of AMHS modeling and design for semiconductor wafer fabrication

A generic model for cluster tool throughput time and capacity

Simultaneous control of multiple nonuniformity metrics using site models and monitor wafer control

Implementing automated equipment performance control in the manufacturing work cell

The Fraunhofer Institute for Integrated Circuits: bridging the gap between microelectronics technology and applications

Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)
Latest Publications