Ion Implantation Techniques
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16

(FIVE YEARS 0)

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5

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Published By Springer Berlin Heidelberg

9783642687815, 9783642687792

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Ion Sources

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_2 ◽

1982 ◽

pp. 23-71 ◽

Cited By ~ 6

Author(s):

D. Aitken

Keyword(s):

Ion Sources

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Range Distributions

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_7 ◽

1982 ◽

pp. 177-205 ◽

Cited By ~ 13

Author(s):

Heiner Ryssel

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The Calculation of Ion Ranges in Solids with Analytic Solutions

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_6 ◽

1982 ◽

pp. 157-176 ◽

Cited By ~ 19

Author(s):

J. P. Biersack ◽

J. F. Ziegler

Keyword(s):

Analytic Solutions ◽

Ion Ranges

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The IONMICROPROBE A-DIDA 3000-30 for Dopant Depth Profiling and Impurity Bulk Analysis

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_16 ◽

1982 ◽

pp. 361-366

Author(s):

J. L. Maul ◽

H. Frenzel

Keyword(s):

Depth Profiling ◽

Bulk Analysis

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Evolution and Performance of the Nova NV-ID Predep™ Implanter

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_12 ◽

1982 ◽

pp. 319-342 ◽

Cited By ~ 2

Author(s):

G. Ryding

Keyword(s):

And Performance

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Non-Electrical Measuring Techniques

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_10 ◽

1982 ◽

pp. 255-297

Author(s):

P. Eichinger ◽

H. Ryssel

Keyword(s):

Electrical Measuring ◽

Measuring Techniques

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The Stopping and Range of Ions in Solids

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_5 ◽

1982 ◽

pp. 122-156 ◽

Cited By ~ 50

Author(s):

J. P. Biersack ◽

J. F. Ziegler

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Ion Implantation Equipment from Veeco

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_13 ◽

1982 ◽

pp. 343-350

Author(s):

W. A. Scaife ◽

K. Westphal

Keyword(s):

Ion Implantation

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Annealing and Residual Damage

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_11 ◽

1982 ◽

pp. 299-316 ◽

Cited By ~ 2

Author(s):

Siegfried Mader

Keyword(s):

Residual Damage

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Wafer Mapping Techniques for Characterization of Ion Implantation Processing

Ion Implantation Techniques ◽

10.1007/978-3-642-68779-2_9 ◽

1982 ◽

pp. 235-253

Author(s):

M. I. Current ◽

D. S. Perloff ◽

L. S. Gutai

Keyword(s):

Ion Implantation ◽

Mapping Techniques

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