1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest
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MICROFABRICATION OF TWEEZERS WITH LARGE GRIPPING FORCES AND A LARGE RANGE OF MOTION

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.25 ◽

1994 ◽

Author(s):

W.-H. Chu ◽

M. Mehregany

Keyword(s):

Range Of Motion ◽

Large Range

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WAFER-BONDING TECHNOLOGY FOR MICROFABRICATED SHEAR-STRESS SENSORS WITH BACKSIDE CONTACTS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.26 ◽

1994 ◽

Author(s):

H.D. Goldberg ◽

K.S. Breuer ◽

M.A. Schmidt

Keyword(s):

Shear Stress ◽

Wafer Bonding ◽

Stress Sensors ◽

Shear Stress Sensors ◽

Bonding Technology

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BATCH-FABRICATED AREA-EFFICIENT MILLI-ACTUATORS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.9 ◽

1994 ◽

Author(s):

L.-S. Fan ◽

S.J. Woodman ◽

R.C. Moore ◽

L. Crawforth ◽

T.C. Reiley ◽

...

Keyword(s):

Area Efficient

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MICROMACHINED JETS FOR MANIPULATION OF MACRO FLOWS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.55 ◽

1994 ◽

Author(s):

D.J. Coe ◽

M.A. Trautman ◽

A. Glezer ◽

M.G. Allen

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A MICROMACHINED VIBRATING RING GYROSCOPE

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.49 ◽

1994 ◽

Author(s):

M.W. Putty ◽

K. Najafi

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USES OF ELECTROPLATED ALUMINUM IN MICROMACHINING APPLICATIONS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.21 ◽

1994 ◽

Author(s):

A.B. Frazier ◽

M.G. Allen

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SURFACE MICROMACHINED MULTIPLE LEVEL TUNGSTEN MICROACTUATORS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.23 ◽

1994 ◽

Author(s):

L.-Y. Chen ◽

N.C. MacDonald

Keyword(s):

Multiple Level

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STUDIES ON THE SEALING OF SURFACE MICROMACHINED CAVITIES USING CHEMICAL VAPOR DEPOSITED MATERIALS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.24 ◽

1994 ◽

Author(s):

C. Liu ◽

Y.-C. Tai

Keyword(s):

Chemical Vapor ◽

Chemical Vapor Deposited

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A HIGH-DENSITY TACTILE IMAGER FOR READING EMBOSSED CHARACTERS

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.3 ◽

1994 ◽

Author(s):

R.J. DeSouza ◽

K.D. Wise

Keyword(s):

High Density

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SILICON WAFER BONDING FOR MICROMECHANICAL DEVICES

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1994.30 ◽

1994 ◽

Author(s):

M.A. Schmidt

Keyword(s):

Silicon Wafer ◽

Wafer Bonding ◽

Micromechanical Devices

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1994 Solid-State, Actuators, and Microsystems Workshop Technical DigestLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Transducer Research Foundation, Inc.

MICROFABRICATION OF TWEEZERS WITH LARGE GRIPPING FORCES AND A LARGE RANGE OF MOTION

WAFER-BONDING TECHNOLOGY FOR MICROFABRICATED SHEAR-STRESS SENSORS WITH BACKSIDE CONTACTS

BATCH-FABRICATED AREA-EFFICIENT MILLI-ACTUATORS

MICROMACHINED JETS FOR MANIPULATION OF MACRO FLOWS

A MICROMACHINED VIBRATING RING GYROSCOPE

USES OF ELECTROPLATED ALUMINUM IN MICROMACHINING APPLICATIONS

SURFACE MICROMACHINED MULTIPLE LEVEL TUNGSTEN MICROACTUATORS

STUDIES ON THE SEALING OF SURFACE MICROMACHINED CAVITIES USING CHEMICAL VAPOR DEPOSITED MATERIALS

A HIGH-DENSITY TACTILE IMAGER FOR READING EMBOSSED CHARACTERS

SILICON WAFER BONDING FOR MICROMECHANICAL DEVICES

1994 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Latest Publications