VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science
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9780122341014

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VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50016-3 ◽

1981 ◽

pp. 331-340

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Physics and Modeling of Submicron Insulated-Gate Field-Effect Transistors. I

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50013-8 ◽

1981 ◽

pp. 231-263 ◽

Cited By ~ 1

Author(s):

D.K. FERRY

Keyword(s):

Field Effect ◽

Field Effect Transistors

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Contributors

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50001-1 ◽

1981 ◽

pp. ii

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VLSI, A Major New Tool for Productivity Improvement

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50015-1 ◽

1981 ◽

pp. 301-329

Author(s):

PATRICK E. HAGGERTY ◽

BRUCE R. MAYO ◽

CHARLES H. PHIPPS

Keyword(s):

Productivity Improvement

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Resolution Limitations for Submicron Lithography

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50010-2 ◽

1981 ◽

pp. 83-127

Author(s):

M.P. LEPSELTER ◽

W.T. LYNCH

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Manufacturing Process Technology for MOS VLSI

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50008-4 ◽

1981 ◽

pp. 1-40 ◽

Cited By ~ 1

Author(s):

FRED W. VOLTMER

Keyword(s):

Manufacturing Process ◽

Process Technology

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Preface

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50006-0 ◽

1981 ◽

pp. xiii-xiv

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Copyright page

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50003-5 ◽

1981 ◽

pp. iv

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The Government Role in VLSI

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50014-x ◽

1981 ◽

pp. 265-299 ◽

Cited By ~ 1

Author(s):

JAY H. HARRIS

Keyword(s):

Government Role ◽

The Government

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Limitations of Small Devices and Large Systems

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science ◽

10.1016/b978-0-12-234101-4.50012-6 ◽

1981 ◽

pp. 185-230 ◽

Cited By ~ 2

Author(s):

R.W. KEYES

Keyword(s):

Large Systems

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VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure ScienceLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Elsevier

Index

Physics and Modeling of Submicron Insulated-Gate Field-Effect Transistors. I

Contributors

VLSI, A Major New Tool for Productivity Improvement

Resolution Limitations for Submicron Lithography

Manufacturing Process Technology for MOS VLSI

Preface

Copyright page

The Government Role in VLSI

Limitations of Small Devices and Large Systems

VLSI Electronics Microstructure Science - VLSI Electronics: Microstructure Science
Latest Publications