Ion Implantation and Activation
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12

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Published By BENTHAM SCIENCE PUBLISHERS

9781608057900

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Preface

Ion Implantation and Activation ◽

10.2174/9781608057900113020001 ◽

2013 ◽

pp. i-ii

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Index

Ion Implantation and Activation ◽

10.2174/9781608057900113020012 ◽

2013 ◽

pp. 163-165

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Activation of Ion Implanted Impurities

Ion Implantation and Activation ◽

10.2174/9781608057900113020011 ◽

2013 ◽

pp. 143-162

Keyword(s):

Ion Implanted

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Redistribution of Impurities During Solid Phase Epitaxy

Ion Implantation and Activation ◽

10.2174/9781608057900113020010 ◽

2013 ◽

pp. 129-142

Keyword(s):

Solid Phase ◽

Solid Phase Epitaxy

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Recrystallization of Amorphous Layer

Ion Implantation and Activation ◽

10.2174/9781608057900113020009 ◽

2013 ◽

pp. 121-128

Keyword(s):

Amorphous Layer

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Ion Implantation Profile in Multi-Layer Structure

Ion Implantation and Activation ◽

10.2174/9781608057900113020006 ◽

2013 ◽

pp. 54-68

Keyword(s):

Ion Implantation ◽

Layer Structure ◽

Implantation Profile

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Three-Dimensional Ion Implantation Profile Based on Rp Line Concept

Ion Implantation and Activation ◽

10.2174/9781608057900113020005 ◽

2013 ◽

pp. 32-53

Keyword(s):

Ion Implantation ◽

Three Dimensional ◽

Implantation Profile

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Acknowledgements

Ion Implantation and Activation ◽

10.2174/9781608057900113020002 ◽

2013 ◽

pp. iii-iv

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Amorphous Layer Thickness

Ion Implantation and Activation ◽

10.2174/9781608057900113020008 ◽

2013 ◽

pp. 78-120

Keyword(s):

Layer Thickness ◽

Amorphous Layer

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Ion Implantation Profile in Patterned Substrate

Ion Implantation and Activation ◽

10.2174/9781608057900113020003 ◽

2013 ◽

pp. 3-17

Keyword(s):

Ion Implantation ◽

Patterned Substrate ◽

Implantation Profile

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