Micromanufacturing and Nanotechnology
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Published By Springer-Verlag

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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Nanofinishing Techniques

2005 ◽  
pp. 171-195 ◽  
Author(s):  
S. Jha ◽  
V. K. Jain

Nanomechanical Cantilever Devices for Biological Sensors

2005 ◽  
pp. 299-321 ◽  
Author(s):  
Tae Song Kim ◽  
Jeong Hoon Lee ◽  
Dae Sung Yoon
Keyword(s):  
Biological Sensors

Chemical Crosslinking in C60 Thin Films

2005 ◽  
pp. 453-462 ◽  
Author(s):  
Vladimir A. Basiuk ◽  
Edgar Alvarez-Zauco ◽  
Elena V. Basiuk
Keyword(s):  
Thin Films ◽  
Chemical Crosslinking

Features of Surface Micromachining and Wafer Bonding Process

2005 ◽  
pp. 107-130
Author(s):  
S. K. Bag ◽  
Daniela S. Mainardi ◽  
N. P. Mahalik
Keyword(s):  
Wafer Bonding ◽  
Bonding Process ◽  
Surface Micromachining

Principles of MEMS and MOEMS

2005 ◽  
pp. 19-44 ◽  
Author(s):  
N. P. Mahalik ◽  
S. E. Iyuke ◽  
B. H. Ahn
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