Handbook of Silicon Wafer Cleaning Technology
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Published By Elsevier

9780815515548

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Cryogenic Aerosols and Supercritical Fluid Cleaning

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50010-0 ◽

2008 ◽

pp. 429-478 ◽

Cited By ~ 3

Author(s):

Souvik Banerjee ◽

Richard F. Reidy ◽

Laura B. Rothman Mauer

Keyword(s):

Supercritical Fluid

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Materials Science and Process Technology Series

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-8155-1554-8/50019-7 ◽

2008 ◽

pp. 719-722 ◽

Cited By ~ 1

Keyword(s):

Materials Science ◽

Process Technology

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Detection and Measurement of Particulate Contaminants

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50011-2 ◽

2008 ◽

pp. 481-521 ◽

Cited By ~ 1

Author(s):

Ed Terrell ◽

Karen A. Reinhardt

Keyword(s):

Particulate Contaminants

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Overview of Wafer Contamination and Defectivity

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50005-7 ◽

2008 ◽

pp. 93-164 ◽

Cited By ~ 1

Author(s):

Twan Bearda ◽

Paul W. Mertens ◽

Stephen P. Beaudoin

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Plasma Stripping, Cleaning, and Surface Conditioning

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50009-4 ◽

2008 ◽

pp. 355-427 ◽

Cited By ~ 2

Author(s):

Dennis W. Hess ◽

Karen A. Reinhard

Keyword(s):

Surface Conditioning

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New Cleaning and Surface Conditioning Techniques and Technologies

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50014-8 ◽

2008 ◽

pp. 661-688 ◽

Cited By ~ 9

Author(s):

Karen A. Reinhardt

Keyword(s):

Surface Conditioning

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Index

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50016-1 ◽

2008 ◽

pp. 697-718

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Preface to the Second Edition

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50002-1 ◽

2008 ◽

pp. xxiii-xxiv

Author(s):

Werner Kern ◽

Karen Reinhardt

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Copyright

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-8155-1554-8/50018-5 ◽

2008 ◽

pp. iv

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Book Editors and Chapters Authors

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-081551554-8.50015-x ◽

2008 ◽

pp. 689-696 ◽

Cited By ~ 1

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