Silicon-Molecular Beam Epitaxy
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Published By CRC Press

9781351076616

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Models of Silicon Growth and Dopant Incorporation

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-4 ◽

2018 ◽

pp. 65-105

Author(s):

F. Allen ◽

E. Kasper

Keyword(s):

Dopant Incorporation ◽

Silicon Growth

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Homoepitaxy

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-3 ◽

2018 ◽

pp. 31-64

Author(s):

S. S. Iyer ◽

R. A. A. Kubiak ◽

E. H. C. Parker

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Si-MBE Growth Systems — Technology and Practice

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-2 ◽

2018 ◽

pp. 5-30

Author(s):

R.A.A. Kubiak ◽

E.H.C. Parker ◽

S.S. Iyer

Keyword(s):

Mbe Growth

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Introduction

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-1 ◽

2018 ◽

pp. 1-3

Author(s):

E. Kasper

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Possible Device Applications of Silicon Molecular Beam Epitaxy

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-8 ◽

2018 ◽

pp. 181-240

Author(s):

S. Luryi ◽

S. M. Sze

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Device Applications

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Growth of Insulators on Si By MBE

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-6 ◽

2018 ◽

pp. 135-159

Author(s):

Julia M. Phillips

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Insulator Over Silicon Structures

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-5 ◽

2018 ◽

pp. 107-133

Author(s):

H. Ishiwara

Keyword(s):

Silicon Structures

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Device Application: Work to Date

Silicon-Molecular Beam Epitaxy ◽

10.1201/9781351076616-7 ◽

2018 ◽

pp. 161-179

Author(s):

Emmanuel Rosencher

Keyword(s):

Device Application

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