Electron-Beam Technology in Microelectronic Fabrication
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Published By Elsevier

9780121335502

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Index

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50012-2 ◽

1980 ◽

pp. 357-362

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Replication techniques

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50011-0 ◽

1980 ◽

pp. 309-356 ◽

Cited By ~ 3

Author(s):

JACQUES TROTEL ◽

BERNARD FAY

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Mask fabrication by electron-beam lithography

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50010-9 ◽

1980 ◽

pp. 259-307 ◽

Cited By ~ 2

Author(s):

J.P. BALLANTYNE

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Mask Fabrication

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Preface

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50005-5 ◽

1980 ◽

pp. ix-xi

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CONTRIBUTORS

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50001-8 ◽

1980 ◽

pp. ii

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Copyright

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50003-1 ◽

1980 ◽

pp. iv

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Front Matter

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50002-x ◽

1980 ◽

pp. iii

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High resolution lithography

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50006-7 ◽

1980 ◽

pp. 1-58 ◽

Cited By ~ 3

Author(s):

GEORGE R. BREWER

Keyword(s):

High Resolution

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List of Contributors

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50004-3 ◽

1980 ◽

pp. vii

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Device fabrication by electron-beam lithography

Electron-Beam Technology in Microelectronic Fabrication ◽

10.1016/b978-0-12-133550-2.50009-2 ◽

1980 ◽

pp. 217-257 ◽

Cited By ~ 1

Author(s):

RICHARD C. HENDERSON

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Device Fabrication

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