1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391)
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Published By IEEE

0780351541

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A method of quantitative defect analysis and yield forecast by an advanced kill rate from line monitoring data

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773188 ◽

2003 ◽

Cited By ~ 1

Author(s):

H. Kikuchi ◽

N. Nishio

Keyword(s):

Monitoring Data ◽

Defect Analysis ◽

Yield Forecast ◽

Kill Rate

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Impact of RSF with variable coefficients for CD variation analysis including OPC

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773197 ◽

2003 ◽

Author(s):

A. Goda ◽

A. Misaka ◽

S. Odanaka

Keyword(s):

Variable Coefficients ◽

Variation Analysis

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A study of within-wafer non-uniformity metrics

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773193 ◽

2003 ◽

Cited By ~ 6

Author(s):

T. Smith ◽

D. Boning ◽

S. Fang ◽

G. Shinn ◽

J. Stefani

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TCAD-prototyping with new accurate worst-case definition for a 0.2 micron CMOS-ASIC process

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773191 ◽

2003 ◽

Author(s):

H. Kunitomo ◽

H. Sato ◽

K. Tsuneno ◽

R. Ikematsu ◽

H. Masuda

Keyword(s):

Case Definition ◽

Worst Case

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Implementation of a TCAD based system to aid process transfer

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773195 ◽

2003 ◽

Author(s):

V.K. Nilsen ◽

A.J. Walton ◽

J. Donnelly ◽

G. Horsburgh ◽

R. Childs

Keyword(s):

Process Transfer

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Fault diagnosis of analog integrated circuits using response surface methods

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773186 ◽

2003 ◽

Cited By ~ 1

Author(s):

J.-L. Vazquez-Gonzalez ◽

G.E. Flores-Verdad

Keyword(s):

Fault Diagnosis ◽

Integrated Circuits ◽

Response Surface ◽

Analog Integrated Circuits ◽

Response Surface Methods

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Circuit performance variability decomposition

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773184 ◽

2003 ◽

Cited By ~ 15

Author(s):

M. Orshansky ◽

C. Spanos ◽

Chenming Hu

Keyword(s):

Circuit Performance ◽

Performance Variability

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High signal-to-noise ratio inspection of sub-quarter micrometer oxide CMP defects by using laser scattering inspection tool

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773189 ◽

2003 ◽

Cited By ~ 1

Author(s):

K. Kato ◽

A. Ueki ◽

T. Kaga

Keyword(s):

Signal To Noise Ratio ◽

High Signal ◽

Signal To Noise ◽

Laser Scattering ◽

Noise Ratio

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A systematic and physical application of multivariate statistics to MOSFET I-V models

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773190 ◽

2003 ◽

Cited By ~ 1

Author(s):

M. Kondo ◽

H. Onodera ◽

K. Tamaru

Keyword(s):

Multivariate Statistics ◽

Physical Application

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Calibration of a 2D numerical model for the optimization of LOCOS type isolations by response surface methodology

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391) ◽

10.1109/iwstm.1999.773194 ◽

2003 ◽

Author(s):

V. Senez ◽

A. Tixier ◽

T. Hoffmann

Keyword(s):

Response Surface Methodology ◽

Numerical Model ◽

Response Surface ◽

2D Numerical Model

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1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A method of quantitative defect analysis and yield forecast by an advanced kill rate from line monitoring data

Impact of RSF with variable coefficients for CD variation analysis including OPC

A study of within-wafer non-uniformity metrics

TCAD-prototyping with new accurate worst-case definition for a 0.2 micron CMOS-ASIC process

Implementation of a TCAD based system to aid process transfer

Fault diagnosis of analog integrated circuits using response surface methods

Circuit performance variability decomposition

High signal-to-noise ratio inspection of sub-quarter micrometer oxide CMP defects by using laser scattering inspection tool

A systematic and physical application of multivariate statistics to MOSFET I-V models

Calibration of a 2D numerical model for the optimization of LOCOS type isolations by response surface methodology

1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391)
Latest Publications