Ion Implantation in Semiconductors
Latest Publications

TOTAL DOCUMENTS

68

(FIVE YEARS 0)

H-INDEX

9

(FIVE YEARS 0)

Published By Springer Berlin Heidelberg

9783642806629, 9783642806605

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

The Presence of Deep Levels in Silicon Implanted with Channeled Low Energy Phosphorus Ions

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_63 ◽

1971 ◽

pp. 466-472 ◽

Cited By ~ 1

Author(s):

N. B. Urli ◽

R. Gislon

Keyword(s):

Deep Levels ◽

Low Energy

Download Full-text

Non-Gaussian Implantation Profiles

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_60 ◽

1971 ◽

pp. 439-454 ◽

Cited By ~ 8

Author(s):

G. Dearnaley ◽

M. A. Wilkins ◽

P. D. Goode

Keyword(s):

Non Gaussian

Download Full-text

Energy Levels of Defects in Ion Implanted Silicon

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_6 ◽

1971 ◽

pp. 23-32 ◽

Cited By ~ 3

Author(s):

D. Eirug Davies ◽

S. Roosild

Keyword(s):

Energy Levels ◽

Ion Implanted

Download Full-text

Application of Ion Implantation to N-P-N-Transistors

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_48 ◽

1971 ◽

pp. 351-356 ◽

Cited By ~ 2

Author(s):

J L. Assémat

Keyword(s):

Ion Implantation

Download Full-text

Recent Advances in Ion Implanted MOS Technology

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_43 ◽

1971 ◽

pp. 315-328 ◽

Cited By ~ 2

Author(s):

H. G. Dill ◽

T. N. Toombs ◽

L. O. Bauer

Keyword(s):

Recent Advances ◽

Ion Implanted

Download Full-text

Electrical Properties of Ion Implanted Germanium

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_42 ◽

1971 ◽

pp. 307-314 ◽

Cited By ~ 6

Author(s):

H. Herzer ◽

S. Kalbitzer

Keyword(s):

Electrical Properties ◽

Ion Implanted

Download Full-text

Infrared Studies of SiC, Si3N4, and SiO2 Formation in Ion-Implanted Silicon

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_33 ◽

1971 ◽

pp. 241-247 ◽

Cited By ~ 17

Author(s):

J. A. Borders ◽

W. Beezhold

Keyword(s):

Infrared Studies ◽

Ion Implanted

Download Full-text

Lattice Disorder and Outdiffusion in Ion Implanted InSb and CdTe

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_31 ◽

1971 ◽

pp. 228-234 ◽

Cited By ~ 8

Author(s):

G. Langguth ◽

E. Lang ◽

O. Meyer

Keyword(s):

Lattice Disorder ◽

Ion Implanted

Download Full-text

Compensation of N-Type GaAs by Proton Bombardment

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_29 ◽

1971 ◽

pp. 212-221 ◽

Cited By ~ 18

Author(s):

B. R. Pruniaux ◽

J. C. North ◽

G. L. Miller

Keyword(s):

Proton Bombardment

Download Full-text

The Retention of Bi Ions Implanted in GaAs

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_27 ◽

1971 ◽

pp. 199-204 ◽

Cited By ~ 5

Author(s):

A. W. Tinsley ◽

W. A. Grant ◽

G. Carter ◽

M. J. Nobes

Download Full-text