Advances In Atomic, Molecular, and Optical Physics
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By Elsevier

9780120038442

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electron collision data for plasma-processing gases

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80029-x ◽

2001 ◽

pp. 59-98 ◽

Cited By ~ 24

Author(s):

Loucas G. Christophorou ◽

James K. Olthoff

Keyword(s):

Plasma Processing ◽

Electron Collision

Download Full-text

Theoretical consideration of plasma-processing processes

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80028-8 ◽

2001 ◽

pp. 33-57 ◽

Cited By ~ 2

Author(s):

Mineo Kimura

Keyword(s):

Theoretical Consideration ◽

Plasma Processing

Download Full-text

Editorial Board

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80024-0 ◽

2001 ◽

pp. ii

Download Full-text

Radical measurements in plasma processing

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80030-6 ◽

2001 ◽

pp. 99-125 ◽

Cited By ~ 10

Author(s):

Toshio Goto

Keyword(s):

Plasma Processing

Download Full-text

Electron interactions with excited atoms and molecules

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80032-x ◽

2001 ◽

pp. 155-293 ◽

Cited By ~ 48

Author(s):

Loucas G. Christophorou ◽

James K. Olthoff

Keyword(s):

Atoms And Molecules ◽

Excited Atoms ◽

Electron Interactions

Download Full-text

Index

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80033-1 ◽

2001 ◽

pp. 295-303

Download Full-text

Mechanisms of electron transport in electrical discharges and electron collision cross sections

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80027-6 ◽

2001 ◽

pp. 1-32 ◽

Cited By ~ 5

Author(s):

Hiroshi Tanaka ◽

Osamu Sueoka

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Electron Collision ◽

Electrical Discharges ◽

Collision Cross Sections

Download Full-text

Preface

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80026-4 ◽

2001 ◽

pp. ix-xi ◽

Cited By ~ 1

Author(s):

Mineo Kimura ◽

Yukikazu Itikawa

Download Full-text

Contents of volumes in this serial

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80034-3 ◽

2001 ◽

pp. 305-315

Download Full-text

Radio-frequency plasma modeling for low-temperature processing

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80031-8 ◽

2001 ◽

pp. 127-154 ◽

Cited By ~ 12

Author(s):

Toshiaki Makabe

Keyword(s):

Low Temperature ◽

Radio Frequency ◽

Radio Frequency Plasma ◽

Plasma Modeling ◽

Frequency Plasma ◽

Low Temperature Processing

Download Full-text

Advances In Atomic, Molecular, and Optical PhysicsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Elsevier

Electron collision data for plasma-processing gases

Theoretical consideration of plasma-processing processes

Editorial Board

Radical measurements in plasma processing

Electron interactions with excited atoms and molecules

Index

Mechanisms of electron transport in electrical discharges and electron collision cross sections

Preface

Contents of volumes in this serial

Radio-frequency plasma modeling for low-temperature processing

Advances In Atomic, Molecular, and Optical Physics
Latest Publications