Handbook of VLSI Microlithography
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Published By Elsevier

9780815514442

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Microlithography Tool Automation

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50008-2 ◽

2001 ◽

pp. 644-669

Author(s):

Charles T. Lambson

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Applications of Ion Microbeams Lithography and Direct Processing

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50011-2 ◽

2001 ◽

pp. 790-855

Author(s):

John Melngailis

Keyword(s):

Direct Processing

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Techniques and Tools for Photo Metrology

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50006-9 ◽

2001 ◽

pp. 382-471

Author(s):

Arnold Yanof

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Contributors

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50002-1 ◽

2001 ◽

pp. xii

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Preface

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50001-x ◽

2001 ◽

pp. vii-x

Author(s):

John N. Helbert

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Electron-Beam ULSI Applications

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50009-4 ◽

2001 ◽

pp. 670-755 ◽

Cited By ~ 2

Author(s):

Allen Lepore

Keyword(s):

Electron Beam

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Lithography Process Monitoring and Defect Detection

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50005-7 ◽

2001 ◽

pp. 327-381

Author(s):

Fourmun Lee

Keyword(s):

Process Monitoring ◽

Defect Detection ◽

Lithography Process

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Rational Vibration and Structural Dynamics for Lithographic Tool Installations

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50010-0 ◽

2001 ◽

pp. 756-789

Author(s):

Kenneth Medearis

Keyword(s):

Structural Dynamics

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X-Ray Lithography

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50012-4 ◽

2001 ◽

pp. 856-956

Author(s):

William B. Glendinning ◽

Franco Cerrina

Keyword(s):

X Ray

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Techniques and Tools for Optical Lithography

Handbook of VLSI Microlithography ◽

10.1016/b978-081551444-2.50007-0 ◽

2001 ◽

pp. 472-643

Author(s):

Whit Waldo

Keyword(s):

Optical Lithography

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