ACS Symposium Series - Materials for Microlithography
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Published By American Chemical Society

0841208719, 0841210942
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scholarly journals PREFACE

1985 ◽  
pp. vii-viii
Author(s):  
L. F. THOMPSON ◽  
C. G. WILLSON ◽  
J. M. J. FRECHET

The Photo-Fries Rearrangement and Its Use in Polymeric Imaging Systems

1985 ◽  
pp. 269-292 ◽  
Author(s):  
T. G. TESSIER ◽  
J. M. J. FRECHET ◽  
C. G. WILLSON ◽  
H. ITO
Keyword(s):  
Imaging Systems ◽  
Fries Rearrangement

Preparation and Resolution Characteristics of a Novel Silicone-Based Negative Resist

1985 ◽  
pp. 311-322 ◽  
Author(s):  
A. TANAKA ◽  
M. MORITA ◽  
S. IMAMURA ◽  
T. TAMAMURA ◽  
O. KOGURE
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