Dry Etching for VLSI
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Published By Springer US

9781489925688, 9781489925664
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The ac Discharge

1991 ◽  
pp. 17-38
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader
Keyword(s):  
Ac Discharge

The Plasma State

1991 ◽  
pp. 5-15
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader
Keyword(s):  
Plasma State

Etch Processes

1991 ◽  
pp. 99-135 ◽  
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader

Diagnostics and Endpoint Detection

1991 ◽  
pp. 137-156
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader
Keyword(s):  
Endpoint Detection

Reactor Technology

1991 ◽  
pp. 75-98
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader
Keyword(s):  
Reactor Technology

Introduction

1991 ◽  
pp. 1-4
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader

Gas and Surface Processes

1991 ◽  
pp. 39-73 ◽  
Author(s):  
A. J. van Roosmalen ◽  
J. A. G. Baggerman ◽  
S. J. H. Brader
Keyword(s):  
Surface Processes
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