Molecular Theory of Lithography
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Published By SPIE

9781628415513

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Theory of Imprint Lithographic Imaging Mechanisms

Molecular Theory of Lithography ◽

10.1117/3.2179925.ch6 ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

Keyword(s):

Imaging Mechanisms

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Overview of Lithography

Molecular Theory of Lithography ◽

10.1117/3.2179925.ch1 ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

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Front Matter

Molecular Theory of Lithography ◽

10.1117/3.2179925.fm ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

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Theory of Block Copolymer Self-assembly Lithographic Imaging Mechanisms

Molecular Theory of Lithography ◽

10.1117/3.2179925.ch5 ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

Keyword(s):

Block Copolymer ◽

Self Assembly ◽

Imaging Mechanisms

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Theory of Photochemical and Radiochemical Lithographic Imaging Mechanisms

Molecular Theory of Lithography ◽

10.1117/3.2179925.ch4 ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

Keyword(s):

Imaging Mechanisms

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Theory of Molecular Interactions in Lithography

Molecular Theory of Lithography ◽

10.1117/3.2179925.ch3 ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

Keyword(s):

Molecular Interactions

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Theory of the Lithographic Process

Molecular Theory of Lithography ◽

10.1117/3.2179925.ch2 ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

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Back Matter

Molecular Theory of Lithography ◽

10.1117/3.2179925.bm ◽

2016 ◽

Author(s):

Uzodinma Okoroanyanwu

Download Full-text