Radio-Frequency Capacitive Discharges
Latest Publications

TOTAL DOCUMENTS

5
(FIVE YEARS 0)

H-INDEX

0
(FIVE YEARS 0)

Published By CRC Press

9780203741337
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Experimental Methods and Measurements

2017 ◽  
pp. 189-224
Author(s):  
Yuri P. Raizer ◽  
Mikhail N. Shneider ◽  
Nikolai A. Yatsenko
Keyword(s):  
Experimental Methods

Moderate-Pressure RF Discharges

2017 ◽  
pp. 45-108
Author(s):  
Yuri P. Raizer ◽  
Mikhail N. Shneider ◽  
Nikolai A. Yatsenko
Keyword(s):  
Moderate Pressure ◽  
Rf Discharges

Low-Pressure RF Discharges and Asymmetry Effects

2017 ◽  
pp. 109-188
Author(s):  
Yuri P. Raizer ◽  
Mikhail N. Shneider ◽  
Nikolai A. Yatsenko
Keyword(s):  
Low Pressure ◽  
Rf Discharges ◽  
Asymmetry Effects

Basic Principles of the RF Capacitive Discharge

2017 ◽  
pp. 1-44
Author(s):  
Yuri P. Raizer ◽  
Mikhail N. Shneider ◽  
Nikolai A. Yatsenko
Keyword(s):  
Basic Principles ◽  
Capacitive Discharge
Load More ...
Sign in / Sign up

Export Citation Format

Share Document