2019 19th International Workshop on Junction Technology (IWJT)
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9784863487277
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Junction technology challenges and solutions for 3D device architecture

2019 ◽  
Author(s):  
Yoshiaki Kikuchi ◽  
Hans Mertens ◽  
Romain Ritzenthaler ◽  
Thomas Chiarella ◽  
Antony Peter ◽  
...  
Keyword(s):  
Device Architecture

Review of applications of Defect Photoluminescence Imaging (DPLI) during IC processing

2019 ◽  
Author(s):  
L. Jastrzebski ◽  
Roffarello ◽  
G. Nadudvari ◽  
Z. Kiss ◽  
I. Lajtos ◽  
...  

Doping of GaN grown on silicon via ion implantation

2019 ◽  
Author(s):  
Frederic Mazen ◽  
Marianne Coig ◽  
Aurelien Lardeau-Falcy ◽  
Lynda Amichi ◽  
Marc Veillerot ◽  
...  
Keyword(s):  
Ion Implantation

Comparing RTA and Laser SPE & LPE Annealing of Ge-epi with Si, Sn & C Implantation for Well Mobility/Strain Engineering

2019 ◽  
Author(s):  
John Borland ◽  
Shang-Shuin Chaung ◽  
Tseung-Yuen Tseng ◽  
Abhijeet Joshi ◽  
Bulent Basol ◽  
...  
Keyword(s):  
Strain Engineering
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