Optical Inspection of Microsystems
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Published By CRC Press

9780429186738
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Grid and Moiré Methods for Micromeasurements

2019 ◽  
pp. 207-243
Author(s):  
Anand Asundi ◽  
Bing Zhao ◽  
Huimin Xie

Optical Profiling Techniques for MEMS Measurement

2019 ◽  
pp. 177-206
Author(s):  
Klaus Körner ◽  
Johann Krauter ◽  
Aiko Ruprecht ◽  
Tobias Wiesendanger
Keyword(s):  
Profiling Techniques

Speckle Metrology for Microsystem Inspection

2019 ◽  
pp. 485-515
Author(s):  
Roland Höfling ◽  
Petra Aswendt
Keyword(s):  
Speckle Metrology
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