Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors
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Published By Springer Berlin Heidelberg

9783540695615

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Miniaturized Metal-Oxide Sensors

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_2 ◽

2007 ◽

pp. 5-15

Keyword(s):

Metal Oxide ◽

Metal Oxide Sensors

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Microsensor Arrays

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_6 ◽

2007 ◽

pp. 87-105

Keyword(s):

Microsensor Arrays

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Monolithic Gas Sensor Systems

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_5 ◽

2007 ◽

pp. 61-85

Keyword(s):

Gas Sensor ◽

Sensor Systems

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Conclusion and Outlook

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_7 ◽

2007 ◽

pp. 107-111

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Introduction

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_1 ◽

2007 ◽

pp. 1-3

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Thermal Modelling of CMOS Microhotplates

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_3 ◽

2007 ◽

pp. 17-28

Keyword(s):

Thermal Modelling

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Microhotplates in CMOS Technology

Microtechnology and MEMS - CMOS Hotplate Chemical Microsensors ◽

10.1007/978-3-540-69562-2_4 ◽

2007 ◽

pp. 29-60

Keyword(s):

Cmos Technology

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