Introduction to Microsystem Design - RWTHedition
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Published By Springer Berlin Heidelberg

9783662470220, 9783662470237

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Membranes

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_7 ◽

2015 ◽

pp. 43-71 ◽

Cited By ~ 1

Author(s):

Werner Karl Schomburg

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Electrical Measurements

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_6 ◽

2015 ◽

pp. 31-42

Author(s):

Werner Karl Schomburg

Keyword(s):

Electrical Measurements

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Thin Films

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_4 ◽

2015 ◽

pp. 9-21

Author(s):

Werner Karl Schomburg

Keyword(s):

Thin Films

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Elastic Deformations

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_3 ◽

2015 ◽

pp. 5-8

Author(s):

Werner Karl Schomburg

Keyword(s):

Elastic Deformations

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Flow Sensors

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_23 ◽

2015 ◽

pp. 339-353 ◽

Cited By ~ 1

Author(s):

Werner Karl Schomburg

Keyword(s):

Flow Sensors

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Thermal Actuators

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_14 ◽

2015 ◽

pp. 201-221

Author(s):

Werner Karl Schomburg

Keyword(s):

Thermal Actuators

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Strain Gauges on Membranes

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_8 ◽

2015 ◽

pp. 73-90

Author(s):

Werner Karl Schomburg

Keyword(s):

Strain Gauges

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Inertial Sensors

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_24 ◽

2015 ◽

pp. 355-362

Author(s):

Werner Karl Schomburg

Keyword(s):

Inertial Sensors

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Micro Valves

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_17 ◽

2015 ◽

pp. 249-275

Author(s):

Werner Karl Schomburg

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Vibrations

Introduction to Microsystem Design - RWTHedition ◽

10.1007/978-3-662-47023-7_10 ◽

2015 ◽

pp. 111-133

Author(s):

Werner Karl Schomburg

Download Full-text

Introduction to Microsystem Design - RWTHeditionLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer Berlin Heidelberg

Membranes

Electrical Measurements

Thin Films

Elastic Deformations

Flow Sensors

Thermal Actuators

Strain Gauges on Membranes

Inertial Sensors

Micro Valves

Vibrations

Introduction to Microsystem Design - RWTHedition
Latest Publications