Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
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Published By CRC Press

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Organic Dielectrics in Multilevel Metallization of Integrated Circuits

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-23 ◽

2002 ◽

pp. 541-622

Keyword(s):

Integrated Circuits ◽

Organic Dielectrics

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Silicon Epitaxy by Chemical Vapor Deposition

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-12 ◽

2002 ◽

pp. 73-138

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Epitaxy

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Chemical Mechanical Polishing

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-22 ◽

2002 ◽

pp. 529-540

Keyword(s):

Chemical Mechanical Polishing ◽

Mechanical Polishing

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Molecular Beam Epitaxy: Equipment and Practice

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-20 ◽

2002 ◽

pp. 409-490

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam

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The Role Of Metrology And Inspection In Semiconductor Processing

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-16 ◽

2002 ◽

pp. 269-314

Keyword(s):

Semiconductor Processing

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Metal Organic Chemical Vapor Deposition: Technology and Equipment

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-14 ◽

2002 ◽

pp. 179-232

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Deposition Technology

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Ion Beam Deposition

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-21 ◽

2002 ◽

pp. 491-528

Keyword(s):

Ion Beam ◽

Ion Beam Deposition ◽

Beam Deposition

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Laser and Electron Beam Assisted Processing

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-19 ◽

2002 ◽

pp. 377-408

Keyword(s):

Electron Beam

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Recent Changes in the Semiconductor Industry

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-10 ◽

2002 ◽

pp. 29-38

Keyword(s):

Semiconductor Industry

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Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon ◽

10.1201/9781482269680-17 ◽

2002 ◽

pp. 315-346

Keyword(s):

Defect Detection ◽

Yield Enhancement ◽

Contamination Control

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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second EditonLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Organic Dielectrics in Multilevel Metallization of Integrated Circuits

Silicon Epitaxy by Chemical Vapor Deposition

Chemical Mechanical Polishing

Molecular Beam Epitaxy: Equipment and Practice

The Role Of Metrology And Inspection In Semiconductor Processing

Metal Organic Chemical Vapor Deposition: Technology and Equipment

Ion Beam Deposition

Laser and Electron Beam Assisted Processing

Recent Changes in the Semiconductor Industry

Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
Latest Publications