2006 IEEE International Conference on Microelectronic Test Structures
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Session 8: MEMS

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614289 ◽

2006 ◽

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Comparison of optical and electrical measurement techniques for CD metrology on alternating aperture phase-shifting masks

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614287 ◽

2006 ◽

Cited By ~ 7

Author(s):

S. Smith ◽

A. Tsiamis ◽

M. McCallum ◽

A.C. Hourd ◽

J.T.M. Stevenson ◽

...

Keyword(s):

Measurement Techniques ◽

Electrical Measurement ◽

Phase Shifting

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MEMS test structure for measuring thermal conductivity of thin films

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614291 ◽

2006 ◽

Cited By ~ 6

Author(s):

L. La Spina ◽

N. Nenadovic ◽

A.W. van Herwaarden ◽

H. Schellevis ◽

W.H.A. Wien ◽

...

Keyword(s):

Thin Films ◽

Thermal Conductivity ◽

Test Structure ◽

Conductivity Of Thin Films

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Ring oscillator based technique for measuring variability statistics

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614281 ◽

2006 ◽

Cited By ~ 57

Author(s):

M. Bhushan ◽

M.B. Ketchen ◽

S. Polonsky ◽

A. Gattiker

Keyword(s):

Ring Oscillator

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Session 5: RF Noise Panel

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614280 ◽

2006 ◽

Keyword(s):

Rf Noise

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Impact of neighbor components heating on power transistor electrical behavior

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614304 ◽

2006 ◽

Cited By ~ 2

Author(s):

H. Beckrich ◽

S. Ortolland ◽

D. Pache ◽

D. Celi ◽

D. Gloria ◽

...

Keyword(s):

Electrical Behavior ◽

Power Transistor

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A test structure to separately analyze CMOSFET reliabilities around center and edge along the channel width

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614301 ◽

2006 ◽

Author(s):

T. Ohzone ◽

E. Ishii ◽

T. Morishita ◽

K. Komoku ◽

T. Matsuda ◽

...

Keyword(s):

Test Structure ◽

Channel Width

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New test structures for extraction of base sheet resistance in BiCMOS technology

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614270 ◽

2006 ◽

Cited By ~ 1

Author(s):

C. Raya ◽

F. Pourchon ◽

D. Celi ◽

M. Laurens ◽

T. Zimmer

Keyword(s):

Sheet Resistance ◽

Bicmos Technology

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A 65nm random and systematic yield ramp infrastructure utilizing a specialized addressable array with integrated analysis software

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614284 ◽

2006 ◽

Cited By ~ 14

Author(s):

M. Karthikeyan ◽

S. Fox ◽

W. Cote ◽

G. Yeric ◽

M. Hall ◽

...

Keyword(s):

Integrated Analysis ◽

Analysis Software

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Impact of GHz disturbances on DC parametric measurements

2006 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2006.1614278 ◽

2006 ◽

Author(s):

H.P. Tuinhout ◽

P.G.M. Baltus

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2006 IEEE International Conference on Microelectronic Test StructuresLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Session 8: MEMS

Comparison of optical and electrical measurement techniques for CD metrology on alternating aperture phase-shifting masks

MEMS test structure for measuring thermal conductivity of thin films

Ring oscillator based technique for measuring variability statistics

Session 5: RF Noise Panel

Impact of neighbor components heating on power transistor electrical behavior

A test structure to separately analyze CMOSFET reliabilities around center and edge along the channel width

New test structures for extraction of base sheet resistance in BiCMOS technology

A 65nm random and systematic yield ramp infrastructure utilizing a specialized addressable array with integrated analysis software

Impact of GHz disturbances on DC parametric measurements

2006 IEEE International Conference on Microelectronic Test Structures
Latest Publications