Nanoscale Calibration Standards and Methods
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Published By Wiley-VCH Verlag Gmbh & Co. Kgaa

9783527606665, 9783527405022
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Pitch and CD Measurements at Anisotropically Etched Si Structures in an SEM

2006 ◽  
pp. 375-384 ◽  
Author(s):  
C. G. Frase ◽  
S. Czerkas ◽  
H. Bosse ◽  
Yu. A. Novikov ◽  
A. V. Rakov

Combined Confocal and Scanning Probe Sensor for Nano-Coordinate Metrology

2006 ◽  
pp. 131-143
Author(s):  
Dmitri V. Sokolov ◽  
Dmitri V. Kazantsev ◽  
James W. G. Tyrrell ◽  
Tomasz Hasek ◽  
Hans U. Danzebrink
Keyword(s):  
Scanning Probe ◽  
Coordinate Metrology ◽  
Probe Sensor
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