Lon Implantation in Semiconductors
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Published By Elsevier

9780124808508
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Ranges and Range Distributions of Implanted Atoms

1970 ◽  
pp. 10-64 ◽  
Author(s):  
James W. Mayer ◽  
Lennart Eriksson ◽  
John A. Davies

General Features of Ion Implantation

1970 ◽  
pp. 1-9
Author(s):  
James W. Mayer ◽  
Lennart Eriksson ◽  
John A. Davies
Keyword(s):  
Ion Implantation
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