An Introduction to Surface-Micromachining
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Published By Springer US

9781475710779, 9781402080210
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electrostatic Actuators

2004 ◽  
pp. 135-152 ◽  
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran
Keyword(s):  
Electrostatic Actuators

Electrical Components

2004 ◽  
pp. 103-113
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran
Keyword(s):  
Electrical Components

Design Rules

2004 ◽  
pp. 75-79
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran
Keyword(s):  
Design Rules

Micromachining Technologies

2004 ◽  
pp. 29-41
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran

Raised Structures

2004 ◽  
pp. 165-173
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran

Electro-Thermal-Compliant Actuators

2004 ◽  
pp. 153-164
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran
Keyword(s):  
Compliant Actuators

Microfabrication Processes

2004 ◽  
pp. 9-28
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran

MUSiC® Process

2004 ◽  
pp. 183-184
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran

PolyMUMP∡ Process

2004 ◽  
pp. 177-179
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran

Non-Ideal Processes

2004 ◽  
pp. 81-92
Author(s):  
Robert W. Johnstone ◽  
M. Parameswaran
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