Microsystems - Materials & Process Integration for MEMS
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Published By Springer US

9781441953032, 9781475757910
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A Novel Bulk Micromachining Method in Gallium Arsenide

2002 ◽  
pp. 175-184
Author(s):  
Dong-il Dan Cho ◽  
Jongpal Kim ◽  
Setae Kim ◽  
Sangjun Park ◽  
Seung-Joon Paik ◽  
...  
Keyword(s):  
Gallium Arsenide

Self-Assembled Monolayers (SAM) for Tunneling Sensors

2002 ◽  
pp. 113-132
Author(s):  
Francis E. H. Tay ◽  
S. J. O’Shea ◽  
Andrew T. S. Wee ◽  
Poh Chong Lim ◽  
Andojo Ongkodjojo
Keyword(s):  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled

Tactical Grade MEMS Gyroscopes Fabricated by the SBM Process

2002 ◽  
pp. 257-272
Author(s):  
Dong-il Dan Cho ◽  
Sangjun Park ◽  
Jongpal Kim ◽  
Sangchul Lee ◽  
Sang Woo Lee
Keyword(s):  
Mems Gyroscopes

Spray Coating Technology of Photoresist/Polymer for 3-D Patterning and Interconnect

2002 ◽  
pp. 203-229
Author(s):  
Arief Budiman Suriadi ◽  
Vineet Sharma ◽  
Bernhard Wieder ◽  
Gerald Mittendorfer
Keyword(s):  
Spray Coating ◽  
Coating Technology
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