Handbook of Silicon Wafer Cleaning Technology
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Published By Elsevier

9780323510844

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Copyright

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.12001-5 ◽

2018 ◽

pp. iv

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List of Contributors

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.01002-9 ◽

2018 ◽

pp. xi

Author(s):

Kaveh Bakhtari ◽

Twan Bearda ◽

Stephen P. Beaudoin ◽

Joel L. Bigman ◽

Brian Brown ◽

...

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Foreword ∗

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.06001-9 ◽

2018 ◽

pp. xiii-xv

Author(s):

Dennis W. Hess

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Surface Chemical Composition and Morphology

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.00009-5 ◽

2018 ◽

pp. 505-577

Author(s):

Sara M. Rupich ◽

Yves J. Chabal

Keyword(s):

Chemical Composition ◽

Surface Chemical ◽

Surface Chemical Composition

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Preface and Acknowledgments ∗

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.05001-2 ◽

2018 ◽

pp. xvii-xviii

Author(s):

Karen A. Reinhardt

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Particle Deposition and Adhesion

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.00003-4 ◽

2018 ◽

pp. 153-184 ◽

Cited By ~ 1

Author(s):

Ahmed Busnaina ◽

Kaveh Bakhtari ◽

Jin-Goo Park

Keyword(s):

Particle Deposition

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Metal Surface Chemical Composition and Morphology

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.00010-1 ◽

2018 ◽

pp. 579-618 ◽

Cited By ~ 1

Author(s):

Jin-Goo Park ◽

Nagarjuna R. Paluvai ◽

R. Prasanna Venkatesh

Keyword(s):

Chemical Composition ◽

Metal Surface ◽

Surface Chemical ◽

Surface Chemical Composition

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Ultratrace Impurity Analysis of Wafer Surfaces

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.00013-7 ◽

2018 ◽

pp. 701-741 ◽

Cited By ~ 1

Author(s):

Steven M. Hues ◽

Luke Lovejoy

Keyword(s):

Impurity Analysis ◽

Wafer Surfaces

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Monitoring of Chemicals and Water

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.00011-3 ◽

2018 ◽

pp. 619-657

Author(s):

Joel L. Bigman ◽

Karen A. Reinhardt

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Gas-Phase Wafer Cleaning Technology

Handbook of Silicon Wafer Cleaning Technology ◽

10.1016/b978-0-323-51084-4.00006-x ◽

2018 ◽

pp. 305-377

Author(s):

Antonio L.P. Rotondaro ◽

Anthony J. Muscat

Keyword(s):

Gas Phase ◽

Wafer Cleaning ◽

Cleaning Technology

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