Nano-Lithography
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Published By John Wiley & Sons, Inc.

9781118622582, 9781848212114
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Metrology for Lithography

2013 ◽  
pp. 249-320
Author(s):  
Johann Foucher ◽  
Jérôme Hazart

Patterning with Self-Assembling Block Copolymers

2013 ◽  
pp. 231-248
Author(s):  
Karim Aissou ◽  
Martin Kogelschatz ◽  
Claire Agraffeil ◽  
Alina Pascale ◽  
Thierry Baron
Keyword(s):  
Block Copolymers ◽  
Self Assembling

NanoImprint Lithography

2013 ◽  
pp. 87-168 ◽  
Author(s):  
Stefan Landis
Keyword(s):  
Nanoimprint Lithography

X-ray Lithography

2013 ◽  
pp. 1-86
Author(s):  
Massimo Tormen ◽  
Gianluca Grenci ◽  
Benedetta Marmiroli ◽  
Filippo Romanato
Keyword(s):  
X Ray
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