Design and Manufacturing of Active Microsystems - Microtechnology and MEMS
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Published By Springer Berlin Heidelberg

9783642129025, 9783642129032
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Wear Behavior in Microactuator Interfaces

2011 ◽  
pp. 69-88
Author(s):  
R. Bandorf ◽  
F. Pape ◽  
H. H. Gatzen ◽  
G. Bräuer
Keyword(s):  
Wear Behavior

Drive Systems Based on Electromagnetic Microactuators

2011 ◽  
pp. 29-47
Author(s):  
V. Ganesan ◽  
K. Wiedmann ◽  
A. Beradinelli ◽  
S. Demmig ◽  
H.-D. Stölting ◽  
...  
Keyword(s):  
Drive Systems

Microassembly Following the Desktop Factory Concept

2011 ◽  
pp. 393-409 ◽  
Author(s):  
A. Burisch ◽  
S. Deumlich ◽  
R. Degen ◽  
A. Raatz ◽  
J. Hesselbach

Electromagnetic Design of Microactuators

2011 ◽  
pp. 11-28
Author(s):  
G. Janssen ◽  
R. Gehrking ◽  
J. Edler ◽  
B. Ponick ◽  
H.-D. Stölting
Keyword(s):  
Electromagnetic Design
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