Nanofabrication
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Published By CRC Press

9781315370514
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

scholarly journals Substrate Materials

2016 ◽  
pp. 127-137
Author(s):  
Andrew Sarangan

scholarly journals Wet Chemical and Plasma Etching

2016 ◽  
pp. 209-240
Author(s):  
Andrew Sarangan
Keyword(s):  
Plasma Etching ◽  
Wet Chemical

scholarly journals Metrology for Device Fabrication

2016 ◽  
pp. 279-287
Author(s):  
Andrew Sarangan
Keyword(s):  
Device Fabrication

scholarly journals Lithography

2016 ◽  
pp. 139-207
Author(s):  
Andrew Sarangan

scholarly journals Thin-Film Optics

2016 ◽  
pp. 99-125
Author(s):  
Andrew Sarangan
Keyword(s):  
Thin Film ◽  
Thin Film Optics
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