2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

9781424409501

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

New manufacturing method for capacitive ultrasonic transducers with monocrystalline membrane

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4432987 ◽

2007 ◽

Cited By ~ 1

Author(s):

Patrice Rey ◽

M. Salhi ◽

S. Giroud ◽

P. Robert ◽

C. Lagahe-Blanchard ◽

...

Keyword(s):

Ultrasonic Transducers ◽

Manufacturing Method

Download Full-text

2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4433168 ◽

2007 ◽

Cited By ~ 4

Author(s):

T. Chu Duc ◽

G. K. Lau ◽

J. Wei ◽

P.M. Sarro

Keyword(s):

Driving Voltage ◽

Rotation Motion

Download Full-text

MEMS sensor for in situ TEM Atomic Force Microscopy

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4433025 ◽

2007 ◽

Cited By ~ 1

Author(s):

A. Nafari ◽

D. Karlen ◽

C. Rusu ◽

K. Svensson ◽

H. Olin ◽

...

Keyword(s):

Atomic Force Microscopy ◽

In Situ Tem ◽

Force Microscopy ◽

Mems Sensor ◽

Atomic Force

Download Full-text

Author and keyword indexes

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4432958 ◽

2007 ◽

Download Full-text

Technical digest

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4432957 ◽

2007 ◽

Download Full-text

gold-nanoparticle-enhanced IGG immunological detection by in-situ fabry-perot sensor

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4432985 ◽

2007 ◽

Author(s):

Yuan-Tai Tseng ◽

Shu-Ting Jhuang ◽

Chung-Shi Yang ◽

Fan-Gang Tseng

Keyword(s):

Gold Nanoparticle ◽

Immunological Detection ◽

Fabry Perot

Download Full-text

VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4433091 ◽

2007 ◽

Cited By ~ 5

Author(s):

J. Teva ◽

G. Abadal ◽

A. Uranga ◽

J. Verd ◽

F. Torres ◽

...

Keyword(s):

Cmos Technology ◽

Monolithically Integrated ◽

Mems Resonator ◽

Cmos Mems

Download Full-text

Highly reliable and extremely stable SiGe micro-mirrors

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4433173 ◽

2007 ◽

Cited By ~ 5

Author(s):

M. Gromova ◽

Ph. Muller ◽

T. Lauwagie ◽

M. Willegems ◽

S. Locorotondo ◽

...

Download Full-text

Nano-metal-ink-based electrode embedded in parylene HARS with the aid of the capillary effect

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4433061 ◽

2007 ◽

Author(s):

Takumi Tsutsumino ◽

Yuji Suzuki ◽

Noriko Sakurai ◽

Nobuhide Kasagi ◽

Yoshihiko Sakane

Keyword(s):

Capillary Effect

Download Full-text

Oral presentations

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2007.4432956 ◽

2007 ◽

Keyword(s):

Oral Presentations

Download Full-text

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

New manufacturing method for capacitive ultrasonic transducers with monocrystalline membrane

2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

MEMS sensor for in situ TEM Atomic Force Microscopy

Author and keyword indexes

Technical digest

gold-nanoparticle-enhanced IGG immunological detection by in-situ fabry-perot sensor

VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology

Highly reliable and extremely stable SiGe micro-mirrors

Nano-metal-ink-based electrode embedded in parylene HARS with the aid of the capillary effect

Oral presentations

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
Latest Publications