Nanolithography and patterning techniques in microelectronics
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Published By CRC Press

9780849334474, 9781439823651

Author(s):  
D-Y Khang ◽  
Y Kim ◽  
H Lee ◽  
K Suh ◽  
K Yoo

Author(s):  
P Chaikin ◽  
R Register ◽  
M Trawick ◽  
D Angelescu
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