NATO Science Series - Smart Sensors and MEMS
Latest Publications

TOTAL DOCUMENTS

14

(FIVE YEARS 0)

H-INDEX

3

(FIVE YEARS 0)

Published By Springer Netherlands

9781402029288

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Uncooled Infrared MEMS Detectors

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_12 ◽

2007 ◽

pp. 381-419

Author(s):

P. G. Datskos ◽

N. V. Lavrik

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Modern Silicon-based MEMS Technology

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_8 ◽

2007 ◽

pp. 255-272 ◽

Cited By ~ 1

Author(s):

Ulrich Mescheder

Keyword(s):

Mems Technology ◽

Silicon Based

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Thermal Design of Microelectronics Systems

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_10 ◽

2007 ◽

pp. 289-329

Author(s):

Dmytro Fedasyuk ◽

Volodymyr Makar

Keyword(s):

Thermal Design

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Porous Silicon: Technology and Applications for Micromachining and MEMS

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_9 ◽

2007 ◽

pp. 273-288 ◽

Cited By ~ 9

Author(s):

Ulrich Mescheder

Keyword(s):

Porous Silicon ◽

Silicon Technology

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Micro-Hall Magnetic Sensors: Physics, Technologies and Applications

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_7 ◽

2007 ◽

pp. 229-253

Author(s):

Radivoje S. Popovic ◽

Giovanni Boero ◽

Pierre-Andre Besse

Keyword(s):

Magnetic Sensors

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Precise Vectorial Magnetic Sensors

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_6 ◽

2007 ◽

pp. 203-228

Author(s):

Pavel Ripka

Keyword(s):

Magnetic Sensors

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Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_4 ◽

2007 ◽

pp. 125-154 ◽

Cited By ~ 3

Author(s):

Vittorio Ferrari

Keyword(s):

Acoustic Wave ◽

Thick Films ◽

Pyroelectric Sensors

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Resonant Piezoelectric Devices as Physical and Biochemical Sensors

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_3 ◽

2007 ◽

pp. 91-123 ◽

Cited By ~ 3

Author(s):

Fabien Josse ◽

Richard W. Cernosek

Keyword(s):

Biochemical Sensors ◽

Piezoelectric Devices

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Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_14 ◽

2007 ◽

pp. 447-474

Author(s):

Eugenii Katz

Keyword(s):

Hybrid Systems ◽

Electronic Biosensors

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Wireless Passive SAW Identification Marks and Sensors

NATO Science Series - Smart Sensors and MEMS ◽

10.1007/978-1-4020-2929-5_5 ◽

2007 ◽

pp. 155-202 ◽

Cited By ~ 2

Author(s):

Elke Mackensen ◽

Leonhard Reindl

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