Вариация состояния поверхности в ходе сканирования в низковольтном РЭМ и ее влияние на размеры рельефной структуры

The emission variation of SSE from surface fragments of protrusions in a silicon plate is evaluated during prolonged scanning in low energy SEM. Emission dynamic variation that is especially complex near the edges of protrusion upper bases and slopes is discovered that affects the sizes of all protrusion fragments. Emission variation is explained with changes of unevenly localized charge state at different surface fragments of protrusions in a natural silica and a contamination film. Contamination is occurred in vacuum and depends on a surface charge state so it is not uniform along protrusion surface. The total absence of contamination on some protrusions is fixed so its initial linewidth size is occurred a constant during a scanning. The limiting uprising of a linewidth size to 4.5 at a one case and the limiting decrease to -0.8 at another case are fixed. Yu. V. Larionov, Senior Researcher, A.M. Prokhorov General Physics Institute, RAS, Moscow, 119991, Russian Federation, E-mail: [email protected], Yu. V. Ozerin, Leading Engineer, [email protected] Mikron Co., Zelenograd, Russia

Smart Environmental Protection: The New Pathway for the Application of the Internet of Things in Environmental Management

The intellectual environmental management can be realized accurately by applying the technology of the Internet of Things (IOT) to sense the environmental monitoring object and to precede the data mining application based on the monitoring. Taking Shanxi Province’s environmental IOT system as an example, this system had been achieved real time monitoring .The monitoring data has been applied to the total pollutant emission reduction verification, pollutant emission charge, administrative penalties, total pollutant emission dynamic management, pollutant emission allowance trade, and environmental mobile law-enforcing system, which provides a solid platform for the environmental management .Applying the technology of the IOT, using the “Whole Circle”environmental management, combining the environmental economic means, the innovation in methods, mechanism and supervision of environmental protection system can be realized.

Research on Gas Emission Index System for Dynamic Prediction of Outburst Danger

Gas emission dynamic prediction is a non-contact and continuous outburst prediction method. It is based on the difference of gas emission characteristics whether the working face exists dangerous factors, selecting appropriate indicators to predict outburst danger. The indicators that reflect abnormal gas emission is divided into four types: gas content, desorption characteristics, gas emission fluctuation and gas emission trend change. This paper gives the calculation model of A index that reflect desorption gas content, B index that reflect coal structure and desorption gas characteristics, S index of gas emission standard deviation, Kv index of gas emission variation coefficient. The validity of the real-time prediction using gas emission index for the working face outburst danger is verified by typical cases.